Microelectromechanical systems (MEMS) have been one of the most revolutionary technologies for the first two decades of the XXI century. Throughout twenty years, they quickly led first to an unprecedented miniaturization of sensors of various physical quantities (motion, magnetic field, sonic and ultrasonic waves…) and then to the introduction of microscale actuators (mirrors, lenses, speakers). Even more remarkable is their key enabling role towards artificial intelligence systems, robotics, autonomous mobility, remote patient monitoring, virtual reality… which indicates that their development in…